Characteristics of ZnO Thin Films on Plastic Resin Substrates

Abstract

  ZnO thin films on plastic resin substrates were prepared by RF magnetron sputtering. Substrate used polycarbonate of plastic resin. ZnO thin films changed sputtering time and RF power and produced it. Surface morphology were studied by scanning electron microscopy (SEM) and atomic force mi-croscopy (AFM). Adhesive power of thin films on substrates were studied by peel test. Transparency and surface unevenness of ZnO thin films on plastic resin substrates were able to be improved by lowering RF power. ZnO thin films on plastic resin substrates found that adhesive power was stronger than ITO thin films on plastic resin substrates.