Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
解説
多層膜構造を用いた X 線集光素子と応用
田村 繁治安本 正人上條 長生竹内 晃久鈴木 芳生
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ジャーナル フリー

2009 年 52 巻 4 号 p. 212-217

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抄録
  The X-ray lens is a key technology for the X-ray microscopy at synchrotron radiation (SR) facility. Various types of the focusing optics (lens) for high-energy X-rays have been developed up to now. A multilayer Fresnel zone plate (FZP), which consists of periodic multilayer structure, is one of promising optics. In this review paper, firstly the recent status of various focusing optics for high-energy SR X-rays is described. And next, some of our representative results of the multilayer FZP with high diffraction efficiency and the X-ray microscopic image are shown.
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© 2009 一般社団法人日本真空学会
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