抄録
We have developed a high efficiency ozone killer for reduced pressure and high concentration ozone using ultra-violet (UV) light irradiation to ozone gas. The highly concentrated ozone gas (∼100%) of 30-110 Pa with a flow rate of 50 sccm† can be decomposed to the concentration as low as 5% by UV light (200 nm-300 nm, 15 mW/cm2) irradiation. However, the residual ozone gas concentration increases the supplied ozone flow rate, since ozone molecule must stay in the ozone killer to absorb a UV photon. The photo-type ozone killer can be practically applied to actual processes by optimizing the dimension of the killer for a given pressure and gas flow rate.
