抄録
This paper presents elastic recoil detection analysis (ERDA) of hydrogen (H) located near surface regions using low, medium and high energy ion beams. In particular, cruicial points and application of the ERDA using MeV He+ ions with high reliability and probing depth of ∼1 μm are described in detail. The ERDA by means of a low energy time-of-flight technique and by medium energy Ne+ impact provides a powerful tool for quatitative and highly sensitive detection of H on solid surfaces. The Si(111)-1×1 terminated by H and the reduced TiO2(110) surface exposed to water moelcules are analyzed quantitatively using medium energy Ne+ ions.
