Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
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回転円盤による排気特性
荻原 徳男
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ジャーナル フリー

2010 年 53 巻 3 号 p. 154-157

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  We investigated the concept of creating a gas radial flow by employing the molecular drag effect upon gas molecules on rotating disks. All the gas molecules have a circumferential velocity rω (r: distance from the rotating axis, and ω: angular velocity) each time they leave a surface of the rotating disks. As a result, the gas molecules between the rotating disks tend on average to move outward from the center. That is, a radial flow appears. This idea was demonstrated by Monte Carlo simulation of 2 types of rotating disks (flat and corrugated ones). Pumping efficiency was clearly demonstrated for both types of disks when the velocity ratio rω/<v> (<v>: mean velocity) became larger than 1.

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© 2010 一般社団法人日本真空学会
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