Palladium doped tungsten oxide thin films were prepared by RF reactive sputtering in a mixture of argon and oxygen at room temperature. XRD patterns indicated that these films were amorphous. SEM imaging indicated a smaller grain size of palladium doped thin film compared with that of undoped tungsten oxide thin film. With electrochromism, palladium doped tungsten oxide exhibited a reverse optical modulation with respect to the applied potential.
