抄録
Chromium silicon carbide (Cr-Si-C) composite thin film has been deposited on the stainless steel substrate by radio frequency (RF) sputtering and the possibility of the force sensor is discussed. The characteristic of the Cr-Si-C composite thin film force sensor is also described. Small temperature coefficient of resistance (TCR) dispersion has been obtained by a Cr-Si-C composite thin film force sensor, and the TCR was between -20 and 10 ppm/°C at the aspect ratio of 510 and the film thickness of 15 nm. The force sensor with hysteresis-free and good linearity has been prepared on the stainless steel substrate by using the Cr-Si-C composite film. The gauge factor of force sensor has increased according to the reduction of film thickness and the increase of sensor pattern aspect ratio. The gauge factor reached 14.2 at the aspect ratio of 510 and the film thickness of 15 nm, which is 7 times larger than that of Ni-Cr strain gauge.
