Reduction in the Density of Cracks and the Substrate Temperature Dependence of Orientation in the Freestanding BaTiO₃ Thin Films

Abstract

  Freestanding BaTiO₃ (BTO)/Pt films were fabricated and the orientation and crack density of BTO films were investigated as a function of substrate temperature, T_sub, during BTO deposition. When T_sub is low, the BTO film exhibits preferentially (101)-orientated structure. On the other hand, (001)-orientation becomes dominant when T_sub is high. This means that controlling of orientation by changing the T_sub is possible. In addition, the density of cracks of the BTO film on the Pt foil was lower than on the Pt/Ti/SiO₂/Si substrate, as a result of the removal of clamping effect of the substrate.