Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
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高温 Si(001)表面上のアルカリ金属原子吸着・脱離過程のリアルタイム光学測定
森本 真弘大野 真也鈴木 隆則田中 正俊
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2011 年 54 巻 3 号 p. 220-223

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  Adsorption and desorption processes of potassium on a Si(001) surface were investigated by means of Reflectance Difference Spectroscopy (RDS). When potassium was evaporated at a constant current, we could observe monotonous increase in RD intensity towards saturation both at room temperature and 673 K. No indication of desorption of potassium after evaporation was observed at room temperature. At high temperature of 673 K, almost all the potassium atoms were desorbed after evaporation was stopped. Two step desorption processes occurred corresponding to two different adsorption sites.
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