抄録
Scanning probe microscopy (SPM) is a powerful tool to characterize the nanomaterial properties, such as surface morphology, electronic structure, elasticity, ..., etc. However, the SPM image is the dilation of probe shape and specimen geometry. For precise measurement of nano-structure, calibration of SPM instrument, especially for the probe tip and cantilever, is very important. Efforts for the determination of these properties, such as spring constant of the cantilever, probe shape, including international standardization are reported.
