抄録
This study focused on the effect of temperature on a quartz friction pressure gauge, which uses a quartz oscillator as a sensor, for hydrogen sensing at room temperature. The temperature dependence of the nominal pressure and of the impedance and resonance frequency of the quartz oscillator were measured. The nominal pressure was found to depend on both the temperature and relative humidity in the range 0-100%, indicating the necessity for calibration. In contrast, the resonance frequency of the quartz oscillator was found to exhibit a linear dependence on temperature and to be independent of the relative humidity at atmospheric pressure. Thus, it can be used as an indicator of the temperature in order to calibrate the nominal pressure measured by the pressure gauge.
