Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
56 巻, 8 号
選択された号の論文の8件中1~8を表示しています
小特集「表面処理技術」
解説
  • KeeHyun KIM, 渡邊 誠, 黒田 聖治, 川野 直美
    2013 年56 巻8 号 p. 291-297
    発行日: 2013年
    公開日: 2013/08/27
    ジャーナル フリー
      Microstructures of the coatings and single deposited splats formed by advanced thermal spray processes have been investigated using two types of ion beam milling: one is broad argon ion beam for the cross-sectioning of thermal sprayed coatings in a cross section polisher and the other is focused gallium ion beam (FIB) for the cross-sectioning and transmission electron microscopy (TEM) sample preparation of single splats. The cross section of tungsten carbide cobalt (WC-Co) coatings fabricated by the polisher showed that it created a mirrored surface with minimized artifacts such as pull-outs of ceramic particles or smearing of pores which can be made by conventional metallographic preparations. A thin and locally re-thinned membrane of single nickel (Ni) splat was prepared by the FIB technique to observe the internal interface of particle/substrate in high resolution atomic scale images. It was found that the steel substrate was heavily deformed by the impact of a nickel particle with high kinetic and thermal energies. At the periphery region, the particle and the substrate were intimately bonded without any voids or gaps.
  • 堀内 伸, 伯川 秀樹, 中尾 幸道
    2013 年56 巻8 号 p. 298-302
    発行日: 2013年
    公開日: 2013/08/27
    ジャーナル フリー
      Electroless plating (ELP) process using Pt and Pd colloid catalyst has been developed. Au, Pt and Cu metal films with sufficient adhesion were successfully obtained without special treatment of substrate surfaces. Owing to the excellent catalytic property of the Pt nanoparticles, continuous gold thin films can be produced at room temperature using a simple cyanide-free gold electroless plating solution composed of chloroauric acid and hydrogen peroxide. Pd colloidal catalyst has been also developed for a novel Pt ELP process and for commercial Cu ELP process. The process requires no surface modifications for the immobilization of the catalyst, and by simple post-annealing the adhesion of the plated films to various polymer films can be improved dramatically. We have thus developed an environment-friendly etchingless ELP process without the use of toxic and hazardous substances.
  • 西本 明生
    2013 年56 巻8 号 p. 303-306
    発行日: 2013年
    公開日: 2013/08/27
    ジャーナル フリー
      Recent developments in plasma nitriding heat treatment technology were reviewed. The feature of plasma nitriding technology was introduced. Moreover, characteristics of the S phase, which was formed at 673 to 723 K in plasma nitriding of austenitic stainless steel, were explained. Finally, a new nitriding technology, — active screen plasma nitriding technology, was also explained.
  • 黒河 明
    2013 年56 巻8 号 p. 307-314
    発行日: 2013年
    公開日: 2013/08/27
    ジャーナル フリー
      Surface-treatment methods using ozone, such ozone gas treatment with UV light irradiation, immersion in ozone diluted water, and exposure to ozone gas are discussed herein. The objectives of performing ozone surface treatments are to reduce carbon-related contamination on the surface, prepare a clean substrate surface to fabricate a thin-film stacking with sharp interfaces, oxidize a surface to form high-quality oxide thin films, and passivate a metal surface to increase its corrosion resistance. These objectives are achieved because of the high oxidation ability of the ozone molecules and the oxygen radicals resulting from the ozone dissociation. Various applications of ozone surface treatment are also exemplified in this report to reveal their significant potential as surface-treatment tools.
  • 萩野 秀樹, 山口 拓人
    2013 年56 巻8 号 p. 315-321
    発行日: 2013年
    公開日: 2013/08/27
    ジャーナル フリー
      Laser surface modification is one of the methods of surface modification. The use of lasers for the surface modification has been studied since 1960s. Laser surface modification includes a lot of methods such as laser transformation hardening, laser alloying, laser cladding and so on. They have been done to increase surface hardness, to improve wear resistance and corrosion resistance. In this review, some of them are introduced.
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速報
  • 鈴木 淳, 北條 久男, 小林 太吉
    2013 年56 巻8 号 p. 330-332
    発行日: 2013年
    公開日: 2013/08/27
    ジャーナル フリー
      This study focused on the effect of temperature on a quartz friction pressure gauge, which uses a quartz oscillator as a sensor, for hydrogen sensing at room temperature. The temperature dependence of the nominal pressure and of the impedance and resonance frequency of the quartz oscillator were measured. The nominal pressure was found to depend on both the temperature and relative humidity in the range 0-100%, indicating the necessity for calibration. In contrast, the resonance frequency of the quartz oscillator was found to exhibit a linear dependence on temperature and to be independent of the relative humidity at atmospheric pressure. Thus, it can be used as an indicator of the temperature in order to calibrate the nominal pressure measured by the pressure gauge.
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