スパッタリング製膜による調光ミラー薄膜の作製

抄録

  Our group has been developing new functional thin films ‘switchable mirror’ which can be switched between transparent and mirror sates. Using switchable mirror thin film for window glass coating, new smart window is possible to be realized. Among various deposition methods, magnetron sputtering is the most suitable method to prepare switchable mirror thin films. In this paper, preparation and characterization of switchable mirror thin films using sputtering deposition method are reviewed.