Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
研究論文
ステンレス表面上の透過水素分布の観察
宮内 直弥鈴木 真司髙木 祥示後藤 哲二村瀬 義治板倉 明子
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2015 年 58 巻 10 号 p. 387-391

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  Permeation behavior of hydrogen from the backside of a stainless steel membrane (SUS304) was investigated by electron stimulated desorption (ESD) method. Detection system of ESD ion and a sample holder with hydrogen reservoir were incorporated in the scanning electron microscope. The distributions of hydrogen concentration on the sample surface were observed by ESD ion images. The thickness of stainless steel membrane is 100 μm. The membrane has austenite structure including martensite dislocations, and the size of austenite grains, 100-150 μm, is comparable to the thickness of membrane. The ESD ion images are observed at different temperatures, which are controlled from RT to 573 K with 50 K steps. High concentration sites of hydrogen at 323 K are different from the incremental sites at 473 K, suggesting that the former increase is due to the diffusion through martensite phase and the latter is due to austenite phase.
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© 2015 一般社団法人日本真空学会
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