抄録
Diamond-like carbon (DLC) films have attractive properties such as low friction, anti-wear, high hardness, and anti-corrosion. Such DLC films have been fabricated with various deposition methods such as magnetron sputtering, ion plating, filtered arc deposition, and plasma-enhanced chemical vapor deposition. The properties such as low friction in vacuum, electrical conductivity, hydrophobicity, and heat resistance can be added to DLC films by the modification of conventional deposition methods, or the doping of foreign elements. These DLC films can be applied to tribological parts in vacuum environment, dies for plastic moldings, inspection components of semiconductors, components of solar cells, and devices of medical engineering. Modified deposition techniques can also fabricate DLC films to large-scale machine components.
