Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
解説
DLC 膜及び CNx 膜の低摩擦機構解明とタンタル含有 DLC 膜の摩擦特性
野老山 貴行梅原 徳次
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ジャーナル フリー

2015 年 58 巻 6 号 p. 209-214

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抄録
  It is generally taught that low friction and high wear proof of mechanical parts and surfaces are always required. From the commonsense in the world, people already know that we should concern about environmental problems, especially for minimizing the amount of oil use. The carbonaceous thin coating such as Diamond-Like Carbon (DLC) is one of the capable candidates to reduce friction and wear. In this review, we would like to summarize the mechanism of low friction of DLC and CNx, especially for Ali Erdemir, Julian Fontaine and Noritsugu Umehara as strategy of research work. Firstly, the summary of hydrogenated DLC which showed superlow friction by repulsive force is reported. Secondly, the role of hydrogen gas onto low friction of hydrogenated DLC is written. Finally, the superlow friction by CNx and the structural change are summarized.
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© 2015 一般社団法人日本真空学会
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