酸化物半導体ガスセンサのための材料作製技術：最近の研究動向

抄録

　Oxide-semiconductor based gas sensors have been intensively investigated in order to improve the sensitivity and selectivity of a certain gas. This article reviews the recent research progress of gas sensors having oxide semiconductor as an active layer, in particular detecting for H₂ and volatile organic compounds. The semiconductor material for gas sensors reported in this article includes SnO₂, WO₃, ZnO, In₂O₃, and NiO. The sensitivity of gas sensors having different structures and semiconductors is compared.