Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Product Note
Development of Pulse Power Supplies as High Power Impulse Magnetron Sputtering (HiPIMS) Equipment Components for Medical Diamond Like Carbon (DLC) Film Fabrication Processes
Masahide KUROIWA, Tatsuyuki NAKATANI
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2017 Volume 60 Issue 9 Pages 372-375

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