Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2019
Session ID : 1Ca03
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Carrier transport properties of high-frequency epitaxial graphene transistor by using yttrium oxide
*Hirokazu FukidomeTakamasa KamogawaRoki KohamaFuminori SasakiIssei Watanabe
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Abstract

Graphene is anticipated to exhibit excellent high-frequnecy carrier transport properties because of its excellent electronic properties. However, the measured device performances are deteoritated from theoretical values. We study on high-performance radio-frequency graphene devices using Y natural oxide that enables to form a good interface between graphene gate dielectrics. In this presentation, we will show the superiority of Y natural oxide, based on evaluation of high frequency carrier transport properties.

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© 2019 The Japan Society of Vacuum and Surface Science
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