Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2019
Session ID : 2P52
Conference information

Host: The Japan Society of Vacuum and Surface Science

Deposition of Al-doped ZnO thin films on ZnO buffer layer and their properties.
*Satoru Imaizumi, Tatsuro Fukuzumi, Toshiki Suwa, Kunio Okimura
Author information
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (274K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract

This study reports the effect of ZnO buffer layer of Al-doped ZnO (AZO) thin films. As a type of buffer layer, We used ZnO thin films and ZnO nano rod which can be deposited in this laboratory.

Content from these authors
© 2019 The Japan Society of Vacuum and Surface Science
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Abstract of annual meeting of the Surface Science of Japan

Abstract of annual meeting of the Surface Science of Japan

Share this page
feedback
 Top