Host: The Japan Society of Vacuum and Surface Science
Non-evaporable getter (NEG) is a material that can be activated by heating to capture the residual gas molecules and works as a UHV vacuum pump. In this study, zirconium, a typical NEG material, was sputtered onto a sawtooth shaped substrate, which has a large surface area, and the thickness distribution was evaluated by SEM. We also tried to apply the substrate rotation to enhance the thickness uniformity. The thickness of the films increased from valleys to peaks, and the thickness ratio was about 2.2. We are also trying other deposition techniques such as HPPMS to improve the uniformity.
