Verification experiment of suppression of vacuum discharge by NEG coating on anode

Abstract

Electron stimulated desorption (ESD) may be closely involved in the discharge between electrodes in ultrahigh vacuum. Particularly, there is a possibility that the vacuum discharge can be suppressed by reducing the ions generated at anode.It is known that the activated non-evaporable getter (NEG) surface can suppress the ESD as well as the pumping effect. Based on this, we will verify by experiments whether the vacuum discharge can be suppressed by reducing the ESD, which is generation source of the ion, by a vacuum discharge test using NEG-coated electrode.