Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2021
Session ID : 2P19S
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November 4, 2021
Decolortion voltage dependence of electrochromic properties of tungsten oxide films prepared by reactive sputtering
*Kosuke HosakaReiko MiyoshiMd. Shurz MianNakano Takeo
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

The effect of bleaching voltage on the bleaching process of sputtered WO3 films was studied. We have prepared thick (∼1000 nm) WO3 films, a typical electrochromic material, by reactive sputtering and achieved a transmittance of less than 5% at the colored state. However, the transmittance of the sample did not recover satisfactorily after the bleaching. In this study, we attempted to recover the transmittance by varying the bleaching voltage in the range of +1.2 to +2.0 V while fixing the coloration conditions. The bleaching state transmittance was increased with an increase in the bleaching voltage. At +1.8 V, the bleaching state transmittance was reached 97% of the value immediately after the deposition

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© 2021 The Japan Society of Vacuum and Surface Science
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