日本機械学会論文集 A編
Online ISSN : 1884-8338
Print ISSN : 0387-5008
電着銅薄膜の粒子成長過程に着目した応力測定法 : 第1報,粒子生成と粒子成長
北岡 征一郎小林 聡宏大嶋 和彦御厨 照明
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1987 年 53 巻 487 号 p. 646-652

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Using electrodeposited copper foils, the relation between the magnitude of cyclic stress and the number of cycles for the initiation of grain growth and the threshold stresses for grain nucleation and grain growth were examined. Based on the test results, the possibility of the stress measurement using grain growth process was investigated. The threshold stress of grain growth is remarkably lower than that of grain nucleation and the former is controlled by the amplitude of shearing stress as well as the latter. So, taking notice of the phenomenon of grain growth threshold, stress measurement can be done under lower strain amplitude compared with the electroplating method used until now.
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