グラフ理論による送りねじを用いた位置決め機構の動的挙動の解析

抄録

Recently, the fine positioning system has come to be used in the mechanical industry, and has required improvement of positioning accuracy, reduction of positioning time, increase of carrying capacity and so on. However, the existing control method for the positioning stage may cause delay of phase response or residual vibration when disturbance or overweight acts on the system or stage drives at a high speed. In order to obtain the optimum control inputs, it is necessary to grasp the dynamic behaviour of the system exactly. This paper deals with the transient response of the positioning stage using the linear graph theory which has been reported previously. The simulated results are compared with the experimental ones, and they are found to be in good agreement. Through these studies, it is concluded that this method is useful in analysing the dynamic behaviour of a positioning system.