大振幅低周波用無共振剛体振動絶縁装置

抄録

This paper presents a vibration isolation mechanism without resonance. The mechanism is consisting of a linear sliders, ball screw, servo-motor and a table in which there is no spring element, so the table behaves like a rigid body. In the mechanism, the servo-motor rotates the ball screw with the same displacement as the base displacement in the opposite direction. Hence the disturbance is canceled. A well known relative displacement feedback control method was first discussed, and it was shown that the method was insufficient for isolating vibrations, then a method of disturbance cancellation was presented. To validate the present mechanism and the control method, experimental tests were carried out for a model of the mechanism.