抄録
Recently, a periodic nano-structure formation by short pulse laser has been demonstrated for various materials, such as metals, dielectrics, and semiconductors. However, the patterned nano-structure could not be explained by the classical interference model and two temperature thermal model. Short pulse laser-matter interactions have different physics on the ablation mechanism from nanosecond laser ones. Additionally, the nano structure has been used for various kinds of applications, for example, diagnosis of the target composition, removal of small space debris, and surface modification. In this article, features of the short pulse laser ablation are reviewed and some applications are introduced.
