抄録
This paper reviews our recent observations of fine periodic structures, so-called nanostructures, formed on hard thin films of TiN, CrN and DLC irradiated with femtosecond (fs) laser pulses. The size of nanostructures is much smaller than that of well-known ripple structures characterized by the laser wavelength. The structure size and surface morphology depend on polarization, wavelength, fluence and pulse width of the fs laser, as well as on the target material. The laser irradiation conditions have been studied to control the nanostructure formed on the thin films. Under almost the same conditions as for the nanostrucure formation, we have observed that a surface modification of DLC into glassy carbon is induced with the fs laser pulses.
