抄録
We optimized fabrication condition of ZnO luminescent thin film for electron-beam excitation assisted
(EXA) optical microscope. 200 nm gold nanoparticles were observed by EXA microscope using ZnO
thin films fabricated at different substrate temperature. ZnO thin films deposited at 400－600℃ can
provide a higher signal-to-noise (S/N) ratio than films deposited at 200-300℃. In this research, film
deposited at 400℃ was suitable for EXA microscope because the grain size of ZnO film was small and
cathodoluminescence intensity was high enough to construct the EXA microscopic image. This ZnO
film is a possible candidate for the dynamic observation of living cells with high spatial resolution with
EXA microscope.
