抄録
We review a one-step method to fabricate microstructure on a glass plate using laser-induced backside
wet etching (LIBWE). The LIBWE method is based on liquid laser ablation with a conventional pulsed
laser at UV or visible wavelength. We fabricated a well-defined deep microarray without cracks or
chipping formations on the glass plate by the LIBWE method. The system allows us to use the rapid
prototyping of the high precision surface microfabrication of glass and other transparent materials as
laser direct-write processing in a conventional atmospheric environment.
