Characterization of Nanodome on GaN Nanowires Formed with Ga Ion Irradiation

Shunsuke Muto; Sandip Dhara; Anindya Datta; Chi-Wei Hsu; Chin-Ting Wu; Ching-Hsing Shen; Li-Chyong Chen; Kuei-Hsien Chen; Yuh-Lin Wang; Tetsuo Tanabe; Tadashi Maruyama; Hong-Ming Lin; Chia-Chun Chen

doi:10.2320/matertrans.45.435

Shunsuke Muto, Sandip Dhara, Anindya Datta, Chi-Wei Hsu, Chin-Ting Wu, Ching-Hsing Shen, Li-Chyong Chen, Kuei-Hsien Chen, Yuh-Lin Wang, Tetsuo Tanabe, Tadashi Maruyama, Hong-Ming Lin, Chia-Chun Chen

Author information

Shunsuke Muto
Department of Nuclear Engineering, Graduate School of Engineering, Nagoya University
Sandip Dhara
Institute of Atomic and Molecular Sciences, Academia Sinica
Materials Science Division, Indira Gandhi Centre for Atomic Research
Anindya Datta
Institute of Atomic and Molecular Sciences, Academia Sinica
Chi-Wei Hsu
Department of Chemistry, National Taiwan Normal University
Chin-Ting Wu
Institute of Atomic and Molecular Sciences, Academia Sinica
Ching-Hsing Shen
Center for Condensed Matter Sciences, National Taiwan University
Li-Chyong Chen
Center for Condensed Matter Sciences, National Taiwan University
Kuei-Hsien Chen
Institute of Atomic and Molecular Sciences, Academia Sinica
Yuh-Lin Wang
Institute of Atomic and Molecular Sciences, Academia Sinica
Tetsuo Tanabe
Department of Nuclear Engineering, Graduate School of Engineering, Nagoya University
Tadashi Maruyama
The Wakasawan Energy Research Centre
Hong-Ming Lin
Department of Chemistry, National Taiwan Normal University
Chia-Chun Chen
Department of Chemistry, National Taiwan Normal University

Keywords: GaN, nanowires, ion bombardment, transmission electron microscopy, electron energy-loss spectroscopy, energy-filtering transmission electron microscopy

JOURNAL FREE ACCESS

2004 Volume 45 Issue 2 Pages 435-439

DOI https://doi.org/10.2320/matertrans.45.435

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Abstract

Structure of nano-domes formed by Ga⁺ ion irradiation with a focused ion beam (FIB) apparatus onto GaN nanowires (NWs) was examined with conventional transmission electron microscopy (CTEM), electron energy-loss spectroscopy (EELS) and energy-filtering TEM (EF-TEM). The nano-dome consisted of metallic gallium, covered by a GaN layer, the structure of which is amorphous or liquid. It is considered that the dome structure is formed by preferential displacement of lighter element (N) and agglomeration of heavier one (Ga). 1 MeV electron irradiation onto the sample pre-irradiated by Ga⁺ ions at a dose below the threshold for the dome formation induced the N₂ bubble formation without segregating Ga atoms, which suggests the radiation-enhanced diffusion (RED) of heavy atoms plays an important role in the nano-dome formation.

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