Correlation between I_D⁄I_G Ratio from Visible Raman Spectra and sp²/sp³ Ratio from XPS Spectra of Annealed Hydrogenated DLC Film

Abstract

The hydrogened diamond like carbon film (DLCH) with 1 μm thickness is made by hydrocarbon gas ion beam deposition method. The relationship between I_D⁄I_G ratio fitted from visible Raman spectra and sp²/sp³ ratio done from XPS spectra of DLCH film shows a trend. The I_D⁄I_G ratio of deconvoluted visible Raman spectra shows a correlation with sp²/sp³ ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The I_D⁄I_G ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp²/sp³ ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400°C and without severe oxidation.