Abstract
Commercial as-hp (hot pressing) and canning HIP (Hot Isostatic Pressing) treated Cr-Si targets are used throughout this study which with two different compositions: Cr35-Si65 and Cr50-Si50. To evaluate the effects of as-hp and canning treated Cr-Si targets by HIP process, SEM, XRD, microstructure and porosity inspections were performed. The experimental results show that the Canning HIP Cr35-Si65 targets had reduced the porosity about 40% compared with the as-hp ones, and the Cr50-Si50’s even decreased about 65% after HIP treatment. Both nitrogen and oxygen concentrations of the targets were also reduced after Canning HIP treatment. This was especially true for the single silicon in Cr-Si targets such as Cr35-Si65.
