MATERIALS TRANSACTIONS
Online ISSN : 1347-5320
Print ISSN : 1345-9678
FIB Induced Damage Examined with the Low Energy SEM
Šárka MikmekováKenji MatsudaKatsumi WatanabeSusumu IkenoIlona MüllerováLudek Frank
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2011 Volume 52 Issue 3 Pages 292-296

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Abstract

The surface morphology of pure Mg was studied by means of the cathode lens mode equipped scanning low energy electron microscope after bombarding with Ga+ ions at various energies (10, 20, 30, and 40 keV) and incident angles (0°, 30°, 45°, and 60°). In accordance with the Bradley-Harper theory at off-normal angles of incidence ripples were observed on the irradiated areas. The Monte Carlo program SRIM2008 was used to estimate the sputtering yield and damage depth.

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© 2011 The Japan Institute of Metals and Materials
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