FIB Induced Damage Examined with the Low Energy SEM

Abstract

The surface morphology of pure Mg was studied by means of the cathode lens mode equipped scanning low energy electron microscope after bombarding with Ga⁺ ions at various energies (10, 20, 30, and 40 keV) and incident angles (0°, 30°, 45°, and 60°). In accordance with the Bradley-Harper theory at off-normal angles of incidence ripples were observed on the irradiated areas. The Monte Carlo program SRIM2008 was used to estimate the sputtering yield and damage depth.