Online ISSN : 1347-5320
Print ISSN : 1345-9678
ISSN-L : 1345-9678
Thermoelectric Characteristics of n-Type Bi2Te3 and p-Type Sb2Te3 Thin Films Prepared by Co-Evaporation and Annealing for Thermopile Sensor Applications
Jae-Hwan KimJung-Yeol ChoiJae-Man BaeMin-Young KimTae-Sung Oh
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2013 Volume 54 Issue 4 Pages 618-625


A thermoelectric thin-film device consisting of n-type Bi2Te3 and p-type Sb2Te3 thin-film legs was prepared on a glass substrate by using co-evaporation and annealing process. The Seebeck coefficient and the power factor of the co-evaporated Bi2Te3 film were −30 µV/K and 0.7 × 10−4 W/K2·m, respectively, and became substantially improved to −160 µV/K and 16 × 10−4 W/K2·m by annealing at 400°C for 20 min. While the Seebeck coefficient of the co-evaporated Sb2Te3 thin film was 72 µV/K, it increased significantly to 165–142 µV/K by annealing at 200–400°C for 20 min. A maximum power factor of 25 × 10−4 W/K2·m was achieved for the co-evaporated Sb2Te3 film by annealing at 400°C for 20 min. A thermopile sensor consisting of 10 pairs of n-type Bi2Te3 and p-type Sb2Te3 thin-film legs exhibited a sensitivity of 2.7 mV/K.

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© 2013 The Japan Institute of Metals and Materials
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