Characterization of Sputtered Coatings with Various Nitrogen Content Deposited from High Aluminum Alloyed TiAlV Target

Abstract

In this study, a Ti₅₀Al₄₀V₁₀ single alloying target is used to deposit TiAlVN coatings by a direct current (dc) magnetron sputtering technique. The structural, mechanical, and frictional properties of final coatings deposited at a various N₂ content are investigated. It reveals that TiAlVN coating transforms from a single-phase (cubic phase) to a dual-phase structure (cubic and hexagonal phases) with the increase of N₂ content. The highest hardness (∼36.5 GPa) and elastic modulus (∼372 GPa), and a good adhesion strength (∼24.4 N) are achieved in the sample deposited with a N₂ flow rate of 6 sccm, which are determined by the nano-indentation and scratch test measurements. In addition, TiAlVN coating deposited with a N₂ flow rate of 3 sccm has the lowest friction coefficient in the dry and oily conditions.