Profile Measurement by Projecting Two Gratings with Different Pitches

Satoshi KAKUNAI; Koichi IWATA; Tohru SAKAMOTO

doi:10.1007/BF03254890

Satoshi KAKUNAI, Koichi IWATA, Tohru SAKAMOTO

著者情報

キーワード: profile measurement, two gratings, step height, phase-shifting technique, interference fringe, liquid crystal grating, sinusoidal grating

ジャーナルフリー

1994 年 1 巻 2 号 p. 296-298

DOI https://doi.org/10.1007/BF03254890

詳細

抄録

A new method for measuring objects with steps is proposed in which two gratings with different pitches are projected on the object surface. The method is demonstrated with sinusoidal gratings made of laser interference fringes and also sinusoidal gratings formed by liquid crystal controlled by computer. An object with step height of 20 mm is measured with standard variation below 3%.

責任著者(Corresponding author)

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