This is an extensive study of the electrical copper deposit technique for measurement of defects in metal alloy junctions in germanium. These defects are formed during the process of recrystali-zation for two main reasons: one of these growth are dendrite and the other are inclusion of primary defects such as blow holes. The electrical characteristics of these contacts show linear voltage-current relationship as well as large saturation current. This is explained in' terms of a low and distributed value of breakdown voltage and of the current limiting property of spreading resistance attached to each breakdown spot. Distributed value of breakdown voltage are observed at liquid nitrogen temperature.