ニッケル合金蒸着膜の膜厚と組成
1963 年 32 巻 8 号 p. 586-593
詳細
1963 年 32 巻 8 号 p. 586-593
The fluorescent X-ray method is applied to measure the composition and thickness of nickel alloy films evaporated on glass substrates. The results obtained are often spoilt by the presence of iron in glass. The composition of nickel alloy films (Ni-Fe, Ni-Cu and Ni-Cr) is greatly influenced by the evaporation rates, and also by the reaction between alloy and evaporator.
Fairly large differences in composition between films and master alloys are found by inspecting the composition ratio of films in the process of evaporation.
