縮小転写装置用大口径レンズの電子光学特性
1981 年 50 巻 8 号 p. 818-823
詳細
1981 年 50 巻 8 号 p. 818-823
Cooperative Laboratories, VLSI Technology Research Association Paraxial trajectories in a large diameter two stage lens were obtained by computer simulation, in which the magnetic flux density distribution of a symmetric magnetic doublet for the electron reduction projection system was used. The ray equation of the electron was solved and the resolving power and distortion were calculated by applying Glaser's equation. Results are as follows;
(1) On the 1:4 reduction image of 4mm×4mm field, calculated resolving power and distortion were 0.27μm and 0.1%, respectively.
(2) The results were improved by adjusting the exciting current of the 1st to the 2nd projection lens, and a resolving power of 0.15μm and distortion of 0.03% were obtained. These were consistent with the experiment.
(3) The best condition in (2) fitted in with the condition where the electron starting from the object point parallel to the axis reached the image point also parallel to the axis.
