抄録
The presence of tensile stress in silver films evaporated onto and later removedfrom the substrate was found previosly (Mitani et al.: Oyo Butsuri 46 (1977) 677) by X-ray lattice strain analysis. This indicates that there must be some more or less rigid domains in the film, whose strains escape from being detected by the X-ray method, that are in a compressed state and offer resistance to contraction of the film as a whole. In order, therefore, to identify such domains, Young's modulus calculated from the lattice strain and the half value width of X-ray diffraction intensity have been principally studied. It is found that both values decrease as film thickness increases by the deposition. Larger values of the half width are observed if the thickness decreases by etching. These results strongly suggest that the rigid domains are actually the grain boundaries.
