Radioactive tracers with life times from several weeks to a few years are applicable for wear diagnostics of machine parts. We are developing a radioactive-ion (RI) beam implantation method for this purpose using 7Be and 22Na from an in-flight RI beam separator CRIB at RIKEN. According to beam studies, we had enough RI-beam intensity and implantation depth for wear diagnostics and the depth profile was reproduced by calculations with measured energy distribution of the RI beams and SRIM calculation for the energy degraders.