Abstract
Yttria stabilized zirconia (YSZ) films were prepared on Hastelloy-XR alloy substrates by MOCVD at a rate of 100μm h-1. The effect of yttria content on the thermal shock resistance of YSZ films was investigated at 1273 to 1373 K in air. 4 mol% Y2O3-ZrO2 film in a tetragonal structure showed excellent thermal shock resistance without spalling after 1200 thermal cycles at 1373 K.