抄録
Fixed small incident angle of the X-ray beam in the thin film X-ray diffraction (TF-XRD) condition contributes to a shallow X-ray penetration depth into the coating layer. The separated peak patterns of inside layer were obtained by an extension of TF-XRD method. This method had been aplied to bio-functional calcium phosphate coatings, and the separate peak pattern of the inside coating layer was obtained by subtraction the peaks of the shallow layer. Broad peaks were observed at the data of the higher incident angles, then the less crystallinity was revealed in the inside layer of the HAp coating near the substrate compared to the surface layer. This method was also demonstrated on the multi-layer of the ceramic films.
