抄録
Development of high refractive-index (nD>2.0) materials is needed for micro-optical devices to accomplish their optical performances. In this study, films of nD>2.0 were fabricated by heating the organic-inorganic hybrid films. The hybrid films of 0.1~1.0μm in thickness were prepared on glass substrates by the dip-coating technique at room temperature, using Titanium tetra-n-butoxide (TTBu), diphenyldimethoxysilane (DPhDMS), and 3-glycidoxypropyltrimethoxysilane (GPTMS) as starting materials. Refractive indices and thickness of the films were measured by optical interference method. Refractive indices of the hybrid films could be controlled within ±0.01 by choosing the composition. Refractive indices increased with increasing the TTBu content, and nD=1.72 was attained in the 80TTBu-20DPhDMS at 60°C. Heating the films of nD=1.72 at 450°C under oxygen atmosphere, nD=2.25 was achieved. The film still remained amorphous state and had high optical transparency after it was heated up to 450°C.
