抄録
The mesoporous silica thin films with ordered pore structure are promising materials in such applications as sensor arrays, nanoreactors, electronic and photonic function devices, low-dielectric constant films, and hosts for large organic species. Specific pore surface properties such as hydrophobicity, optical and electronic activity is given by grafting or co-condensation method. The co-condensation method allows a higher organic content and a more homogeneous organic distribution. We controlled mesoporous structure of thin films with the ratio of amphiphilic alkylhalide surfactant and tetraalkoxysilane. We fabricated mesoporous thin films with different pore size and mesostructure. We also fabricated PFAS (perfluoroalkylsilane, CF3(CF2)x-(CH2)2-Si-(OCH3)3) hybrid inorganic-organic mesoporous silicate films with different perfluoroalkyl chain length (x=0-7). Through multi spin coating, we made thick films of same pore surface property or multi-mesostructured films with different pore surface property such as pore size, pore structure, and hydrophobicity of pore surface.
