抄録
RF-plasma CVD method is one of the most useful methods for preparing ceramic nanoparticles. In the present study, we tried to synthesize barium titanate nanoparticles by RF-plasma CVD method. Reactants, such as bis-dipivaloylmethanate barium and titanium tetraisopropoxide, were provided into an inductively coupled Ar-oxygen plasma flame with 4MHz frequency, and barium titanate nanoparticles were obtained. Perovskite barium titanate phase was confirmed by XRD as major products. The average particle size of barium titanate was about 10 nm of nanoparticles, and they were well-crystallized to single crystals. Critical particle size from tetragonal to cubic phase transition was estimated to be about 40nm by Rietveld method and Raman spectroscopy.
