抄録
We investigated the effect of processing parameters of electron beam physical vapor deposition (EB-PVD) on the microstructure of yttria stabilized zirconia (YSZ) layers. All the YSZ layers investigated in this study showed a columnar structure. However, significant differences were found in their microstructures. Substrate manipulation during deposition has great influence on porosity, texture, and morphology of the layers. Stationary deposited layer showed a dense columnar structure with less intercolumnar gaps and obscure feather-like structures, and no preferred growth orientation. Rotationally deposited layers showed well developed feather-like structures within each column and hence increasing porosity. In addition, substrate rotation caused strong (100) texture. These results are attributed to the flux shadowing effect induced by oblique vapor incidence caused by substrate manipulation. This work was performed as a part of the Nanostructure Coating Project carried out by the New Energy and Industrial Technology Development Organization.
