Study on formation of micro optical components on densified silica glass by laser irradiation

Abstract

Silica glass was densified by applying high pressure and high temperature, and was irradiated by focused CO₂ laser light. A sharp bump was formed on a broad bump in the irradiated area. We can produce micro lens whose optical properties are not different from those of substrate. The height of sharp bump increased with an increase in laser power to the critical laser power. In contrast, the height of the broad bump was little changed. Both the height of sharp and broad bumps decreased by the irradiation above the critical laser power.