日本セラミックス協会 年会・秋季シンポジウム 講演予稿集
17th Fall Meeting of The Ceramic Society of Japan
セッションID: 1M15
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Preparation of macroporous BaCO3 films for NOx detection by bulk acoustic wave resonator
*Takeo HyodoHuankiat SehHarry L. Tuller
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抄録
Macroporous BaCO3 films were prepared by a modified sol-gel technique employing polymethylmethacrylate (PMMA) microsphere film as template and Ba(CH3COO)2 aqueous solution as the barium source. The films (ca. 1-2 micron thick) exhibited ordered 3-D BaCO3 frameworks with macropores derived from PMMA microspheres, after calcination of BaCO3 precursor/PMMA composite films at 400C for 2 h. The ordered macropores were destroyed after calcination at higher temperatures, however, the high porosity was retained in the films. The NO2 sensing properties of bulk acoustic wave resonator sensitized by macroporous BaCO3 films are reported.
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© The Ceramic Society of Japan 2004
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